Silicon fusion bonding with chemical mechanical polishing

C. Gui, H. Albers, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Paul Lambeck

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationDelft
    Publication statusPublished - 20 Mar 1996

    Keywords

    • METIS-114929

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