Silicon micromachined hollow microneedles for transdermal liquid transport

Johannes G.E. Gardeniers, Regina Lüttge, Johan W. Berenschot, Meint J. de Boer, Shuki Y. Yeshurun, Meir Hefetz, Ronny van 't Oever, Albert van den Berg

Research output: Contribution to journalArticleAcademicpeer-review

263 Citations (Scopus)
154 Downloads (Pure)

Abstract

This paper presents a novel process for the fabrication of out-of-plane hollow microneedles in silicon. The fabrication method consists of a sequence of deep-reactive ion etching (DRIE), anisotropic wet etching and conformal thin film deposition, and allows needle shapes with different, lithography-defined tip curvature. In this study, the length of the needles varied between 150 and 350 micrometers. The widest dimension of the needle at its base was 250 /spl mu/m. Preliminary application tests of the needle arrays show that they are robust and permit skin penetration without breakage. Transdermal water loss measurements before and after microneedle skin penetration are reported. Drug delivery is increased approximately by a factor of 750 in microneedle patch applications with respect to diffusion alone. The feasibility of using the microneedle array as a blood sampler on a capillary electrophoresis chip is demonstrated.
Original languageUndefined
Pages (from-to)855-862
Number of pages8
JournalJournal of microelectromechanical systems
Volume12
Issue number6
DOIs
Publication statusPublished - 2003

Keywords

  • blood sampler
  • deep-reactive ion etching
  • transdermal liquid transport
  • conformal film deposition
  • micromachined microneedles
  • skin penetration
  • METIS-215032
  • 150 to 350 micron
  • IR-46455
  • Drug delivery
  • anisotropic wet etching
  • MEMS
  • Si
  • fabrication method
  • out-of-plane hollow microneedle
  • capillary electrophoresis chip

Cite this

Gardeniers, Johannes G.E. ; Lüttge, Regina ; Berenschot, Johan W. ; de Boer, Meint J. ; Yeshurun, Shuki Y. ; Hefetz, Meir ; van 't Oever, Ronny ; van den Berg, Albert. / Silicon micromachined hollow microneedles for transdermal liquid transport. In: Journal of microelectromechanical systems. 2003 ; Vol. 12, No. 6. pp. 855-862.
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title = "Silicon micromachined hollow microneedles for transdermal liquid transport",
abstract = "This paper presents a novel process for the fabrication of out-of-plane hollow microneedles in silicon. The fabrication method consists of a sequence of deep-reactive ion etching (DRIE), anisotropic wet etching and conformal thin film deposition, and allows needle shapes with different, lithography-defined tip curvature. In this study, the length of the needles varied between 150 and 350 micrometers. The widest dimension of the needle at its base was 250 /spl mu/m. Preliminary application tests of the needle arrays show that they are robust and permit skin penetration without breakage. Transdermal water loss measurements before and after microneedle skin penetration are reported. Drug delivery is increased approximately by a factor of 750 in microneedle patch applications with respect to diffusion alone. The feasibility of using the microneedle array as a blood sampler on a capillary electrophoresis chip is demonstrated.",
keywords = "blood sampler, deep-reactive ion etching, transdermal liquid transport, conformal film deposition, micromachined microneedles, skin penetration, METIS-215032, 150 to 350 micron, IR-46455, Drug delivery, anisotropic wet etching, MEMS, Si, fabrication method, out-of-plane hollow microneedle, capillary electrophoresis chip",
author = "Gardeniers, {Johannes G.E.} and Regina L{\"u}ttge and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and Yeshurun, {Shuki Y.} and Meir Hefetz and {van 't Oever}, Ronny and {van den Berg}, Albert",
year = "2003",
doi = "10.1109/JMEMS.2003.820293",
language = "Undefined",
volume = "12",
pages = "855--862",
journal = "Journal of microelectromechanical systems",
issn = "1057-7157",
publisher = "IEEE",
number = "6",

}

Silicon micromachined hollow microneedles for transdermal liquid transport. / Gardeniers, Johannes G.E.; Lüttge, Regina; Berenschot, Johan W.; de Boer, Meint J.; Yeshurun, Shuki Y.; Hefetz, Meir; van 't Oever, Ronny; van den Berg, Albert.

In: Journal of microelectromechanical systems, Vol. 12, No. 6, 2003, p. 855-862.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Silicon micromachined hollow microneedles for transdermal liquid transport

AU - Gardeniers, Johannes G.E.

AU - Lüttge, Regina

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - Yeshurun, Shuki Y.

AU - Hefetz, Meir

AU - van 't Oever, Ronny

AU - van den Berg, Albert

PY - 2003

Y1 - 2003

N2 - This paper presents a novel process for the fabrication of out-of-plane hollow microneedles in silicon. The fabrication method consists of a sequence of deep-reactive ion etching (DRIE), anisotropic wet etching and conformal thin film deposition, and allows needle shapes with different, lithography-defined tip curvature. In this study, the length of the needles varied between 150 and 350 micrometers. The widest dimension of the needle at its base was 250 /spl mu/m. Preliminary application tests of the needle arrays show that they are robust and permit skin penetration without breakage. Transdermal water loss measurements before and after microneedle skin penetration are reported. Drug delivery is increased approximately by a factor of 750 in microneedle patch applications with respect to diffusion alone. The feasibility of using the microneedle array as a blood sampler on a capillary electrophoresis chip is demonstrated.

AB - This paper presents a novel process for the fabrication of out-of-plane hollow microneedles in silicon. The fabrication method consists of a sequence of deep-reactive ion etching (DRIE), anisotropic wet etching and conformal thin film deposition, and allows needle shapes with different, lithography-defined tip curvature. In this study, the length of the needles varied between 150 and 350 micrometers. The widest dimension of the needle at its base was 250 /spl mu/m. Preliminary application tests of the needle arrays show that they are robust and permit skin penetration without breakage. Transdermal water loss measurements before and after microneedle skin penetration are reported. Drug delivery is increased approximately by a factor of 750 in microneedle patch applications with respect to diffusion alone. The feasibility of using the microneedle array as a blood sampler on a capillary electrophoresis chip is demonstrated.

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KW - deep-reactive ion etching

KW - transdermal liquid transport

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KW - micromachined microneedles

KW - skin penetration

KW - METIS-215032

KW - 150 to 350 micron

KW - IR-46455

KW - Drug delivery

KW - anisotropic wet etching

KW - MEMS

KW - Si

KW - fabrication method

KW - out-of-plane hollow microneedle

KW - capillary electrophoresis chip

U2 - 10.1109/JMEMS.2003.820293

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