Silicon micromachining

Michael Curt Elwenspoek, Henricus V. Jansen

    Research output: Book/Report › Book › Academic

    Original languageUndefined
    Place of PublicationUnited Kingdom
    PublisherCambridge University Press
    Number of pages405
    ISBN (Print)0-521-59054-X
    Publication statusPublished - 1999

    Publication series

    Name
    PublisherCambridge University Press

    Keywords

    • IR-15570
    • METIS-112452

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