Silicon micromachining

Michael Curt Elwenspoek, Henricus V. Jansen

    Research output: Book/ReportBookAcademic

    Original languageUndefined
    Place of PublicationUnited Kingdom
    PublisherCambridge University Press
    Number of pages405
    ISBN (Print)0-521-59054-X
    Publication statusPublished - 1999

    Publication series

    Name
    PublisherCambridge University Press

    Keywords

    • IR-15570
    • METIS-112452

    Cite this

    Elwenspoek, M. C., & Jansen, H. V. (1999). Silicon micromachining. United Kingdom: Cambridge University Press.