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Silicon micromachining

  • M. Elwenspoek
  • , H.V. Jansen

    Research output: Book/Report › Book › Academic

    16 Downloads (Pure)
    Original languageEnglish
    Place of PublicationUnited Kingdom
    PublisherCambridge University Press
    Number of pages405
    ISBN (Print)0-521-59054-X, 0-521-60767-1
    Publication statusPublished - 1999

    Publication series

    Name Cambridge studies in semiconductor physics and microelectronic engineering
    PublisherCambridge University Press
    Volume7

    UN SDGs

    This output contributes to the following UN Sustainable Development Goals (SDGs)

    1. SDG 9 - Industry, Innovation, and Infrastructure
      SDG 9 Industry, Innovation, and Infrastructure

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