Silicon microphones with piezoelectric layers and on-chip circuitry

R. Schellin, M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish-Hotel, Enschede
    Publication statusPublished - 14 Jun 1995

    Keywords

    • METIS-114973

    Cite this

    Schellin, R., Pedersen, M., Olthuis, W., & Bergveld, P. (1995, Jun 14). Silicon microphones with piezoelectric layers and on-chip circuitry. Dish-Hotel, Enschede.