| Original language | Undefined |
|---|---|
| Place of Publication | Dish-Hotel, Enschede |
| Publication status | Published - 14 Jun 1995 |
Keywords
- METIS-114973
Silicon microphones with piezoelectric layers and on-chip circuitry
R. Schellin, M. Pedersen, Wouter Olthuis, Piet Bergveld
Research output: Other contribution › Other research output