Silicon microstructures for fluid handling

Michael Curt Elwenspoek, Theodorus S.J. Lammerink, R. Miyake, R. Miyake, J.H.J. Fluitman

Research output: Contribution to journal › Article › Professional

Keywords

@article{b7367982ded848de8583a0fb50410993,

title = "Silicon microstructures for fluid handling",

keywords = "METIS-116918, IR-17663",

author = "Elwenspoek, {Michael Curt} and Lammerink, {Theodorus S.J.} and R. Miyake and R. Miyake and J.H.J. Fluitman",

year = "1994",

language = "Undefined",

volume = "1994",

pages = "9--12",

journal = "Nieuwsbrief ABB",

issn = "0925-1529",

publisher = "ABB Corporate Management Services AG",

number = "9",

}