Silicon nitride nanosieve membrane

D.H. Tong, Henricus V. Jansen, V.J. Gadgil, C.G. Bostan, Johan W. Berenschot, C.J.M. van Rijn, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    236 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Silicon nitride nanosieve membrane'. Together they form a unique fingerprint.