Silicon-on-nitride for bolometric applications

Stefan Sanchez, C. Gui, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-114722

    Cite this

    Sanchez, S., Gui, C., & Elwenspoek, M. C. (1996, Jun 5). Silicon-on-nitride for bolometric applications. Dish Hotel, Enschede.