Silicon-on-nitride for bolometric applications

Stefan Sanchez, C. Gui, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-114722

    Cite this

    Sanchez, S., Gui, C., & Elwenspoek, M. C. (1996, Jun 5). Silicon-on-nitride for bolometric applications. Dish Hotel, Enschede.
    Sanchez, Stefan ; Gui, C. ; Elwenspoek, Michael Curt. / Silicon-on-nitride for bolometric applications. 1996. Dish Hotel, Enschede.
    @misc{dfc3005577204ecd9e5b1cade5f1a146,
    title = "Silicon-on-nitride for bolometric applications",
    keywords = "METIS-114722",
    author = "Stefan Sanchez and C. Gui and Elwenspoek, {Michael Curt}",
    year = "1996",
    month = "6",
    day = "5",
    language = "Undefined",
    type = "Other",

    }

    Sanchez, S, Gui, C & Elwenspoek, MC 1996, Silicon-on-nitride for bolometric applications. Dish Hotel, Enschede.

    Silicon-on-nitride for bolometric applications. / Sanchez, Stefan; Gui, C.; Elwenspoek, Michael Curt.

    Dish Hotel, Enschede. 1996, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Silicon-on-nitride for bolometric applications

    AU - Sanchez, Stefan

    AU - Gui, C.

    AU - Elwenspoek, Michael Curt

    PY - 1996/6/5

    Y1 - 1996/6/5

    KW - METIS-114722

    M3 - Other contribution

    CY - Dish Hotel, Enschede

    ER -