Silicon oxide interface formation in ALD of Al2O3 studied by in-situ XPS

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 25 Sep 2005
Event11th European Conference on Applications of Surface and Interface Analysis, ECASIA 2005 - Vienna, Austria
Duration: 25 Sep 200530 Sep 2005

Conference

Conference11th European Conference on Applications of Surface and Interface Analysis, ECASIA 2005
Abbreviated titleECASIA
CountryAustria
CityVienna
Period25/09/0530/09/05

Keywords

  • METIS-228654

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