Silicon oxide interface formation in ALD of Al2O3 studied by in-situ XPS

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 25 Sept 2005
Event	11th European Conference on Applications of Surface and Interface Analysis, ECASIA 2005 - Vienna, Austria Duration: 25 Sept 2005 → 30 Sept 2005

Conference	11th European Conference on Applications of Surface and Interface Analysis, ECASIA 2005
Abbreviated title	ECASIA
Country/Territory	Austria
City	Vienna
Period	25/09/05 → 30/09/05

Keywords

@conference{298cc160b12b407390d116667fb438b6,

title = "Silicon oxide interface formation in ALD of Al2O3 studied by in-situ XPS",

keywords = "METIS-228654",

author = "A. Zinine and Sturm, \{Jacobus Marinus\} and Herbert Wormeester and Bene Poelsema",

year = "2005",

month = sep,

day = "25",

language = "Undefined",

pages = "--",

note = "11th European Conference on Applications of Surface and Interface Analysis, ECASIA 2005 ; Conference date: 25-09-2005 Through 30-09-2005",

}

TY - CONF

T1 - Silicon oxide interface formation in ALD of Al2O3 studied by in-situ XPS

AU - Zinine, A.

AU - Sturm, Jacobus Marinus

AU - Wormeester, Herbert

AU - Poelsema, Bene

PY - 2005/9/25

Y1 - 2005/9/25

KW - METIS-228654

M3 - Poster

SP - -

T2 - 11th European Conference on Applications of Surface and Interface Analysis, ECASIA 2005

Y2 - 25 September 2005 through 30 September 2005

ER -