Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride
- Yiping Zhao
- , Johan W. Berenschot
- , Meint J. de Boer
- , Henricus V. Jansen
- , Niels Roelof Tas
- , Jurriaan Huskens
- , Michael Curt Elwenspoek
Research output: Contribution to conference › Paper › peer-review
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