Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride

Yiping Zhao, Johan W. Berenschot, Meint J. de Boer, Henricus V. Jansen, Niels Roelof Tas, Jurriaan Huskens, Michael Curt Elwenspoek

Research output: Contribution to conferencePaperAcademicpeer-review

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