Silicon oxynitride: a versatile material for integrated optics application

Kerstin Worhoff, L.T.H. Hilderink, A. Driessen, Paul Lambeck

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationSilicon nitride and silicon dioxide thin insulating films
    Subtitle of host publicationproceedings of the sixth international symposium
    EditorsK.B. Sundaram
    PublisherThe Electrochemical Society Inc.
    Pages191-205
    ISBN (Print)1-56677-313-x
    Publication statusPublished - 2001
    Event6th Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 2001: Electrochemical Society Proceedings - Washington, United States
    Duration: 25 Mar 200130 Mar 2001

    Publication series

    NameProceedings
    PublisherElectrochemical Society
    Volume2001-7

    Conference

    Conference6th Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 2001
    CountryUnited States
    CityWashington
    Period25/03/0130/03/01

    Keywords

    • METIS-203102

    Cite this

    Worhoff, K., Hilderink, L. T. H., Driessen, A., & Lambeck, P. (2001). Silicon oxynitride: a versatile material for integrated optics application. In K. B. Sundaram (Ed.), Silicon nitride and silicon dioxide thin insulating films: proceedings of the sixth international symposium (pp. 191-205). (Proceedings; Vol. 2001-7). The Electrochemical Society Inc..
    Worhoff, Kerstin ; Hilderink, L.T.H. ; Driessen, A. ; Lambeck, Paul. / Silicon oxynitride: a versatile material for integrated optics application. Silicon nitride and silicon dioxide thin insulating films: proceedings of the sixth international symposium. editor / K.B. Sundaram. The Electrochemical Society Inc., 2001. pp. 191-205 (Proceedings).
    @inproceedings{fafbfb5e9d1c4799aa0fe9c00c7cbbe1,
    title = "Silicon oxynitride: a versatile material for integrated optics application",
    keywords = "METIS-203102",
    author = "Kerstin Worhoff and L.T.H. Hilderink and A. Driessen and Paul Lambeck",
    year = "2001",
    language = "English",
    isbn = "1-56677-313-x",
    series = "Proceedings",
    publisher = "The Electrochemical Society Inc.",
    pages = "191--205",
    editor = "K.B. Sundaram",
    booktitle = "Silicon nitride and silicon dioxide thin insulating films",
    address = "United States",

    }

    Worhoff, K, Hilderink, LTH, Driessen, A & Lambeck, P 2001, Silicon oxynitride: a versatile material for integrated optics application. in KB Sundaram (ed.), Silicon nitride and silicon dioxide thin insulating films: proceedings of the sixth international symposium. Proceedings, vol. 2001-7, The Electrochemical Society Inc., pp. 191-205, 6th Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 2001, Washington, United States, 25/03/01.

    Silicon oxynitride: a versatile material for integrated optics application. / Worhoff, Kerstin; Hilderink, L.T.H.; Driessen, A.; Lambeck, Paul.

    Silicon nitride and silicon dioxide thin insulating films: proceedings of the sixth international symposium. ed. / K.B. Sundaram. The Electrochemical Society Inc., 2001. p. 191-205 (Proceedings; Vol. 2001-7).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Silicon oxynitride: a versatile material for integrated optics application

    AU - Worhoff, Kerstin

    AU - Hilderink, L.T.H.

    AU - Driessen, A.

    AU - Lambeck, Paul

    PY - 2001

    Y1 - 2001

    KW - METIS-203102

    M3 - Conference contribution

    SN - 1-56677-313-x

    T3 - Proceedings

    SP - 191

    EP - 205

    BT - Silicon nitride and silicon dioxide thin insulating films

    A2 - Sundaram, K.B.

    PB - The Electrochemical Society Inc.

    ER -

    Worhoff K, Hilderink LTH, Driessen A, Lambeck P. Silicon oxynitride: a versatile material for integrated optics application. In Sundaram KB, editor, Silicon nitride and silicon dioxide thin insulating films: proceedings of the sixth international symposium. The Electrochemical Society Inc. 2001. p. 191-205. (Proceedings).