Abstract
Silicon oxynitride is a very attractive material for integrated optics. Besides possessing excellent optical properties it can be deposited with refractive indices varying over a wide range by tuning the material composition. In this contribution we will summarize the key properties of this material class and discuss several application examples. Preliminary results on novel processes, which will lead to largely reduced hydrogen incorporation and enable reflow of SiON material, are being presented.
Original language | English |
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Title of host publication | Proceedings 10th Anniversary International Conference on Transparent Optical Networks (ICTON) |
Editors | M. Marciniak, M. Jaworski, M. Zdanowicz |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 266-269 |
Number of pages | 4 |
ISBN (Print) | 978-1-4244-2625-6 |
DOIs | |
Publication status | Published - 22 Jun 2008 |
Event | 10th Anniversary International Conference on Transparent Optical Networks, ICTON 2008 - Athens, Greece Duration: 22 Jun 2008 → 26 Jun 2008 Conference number: 10 |
Conference
Conference | 10th Anniversary International Conference on Transparent Optical Networks, ICTON 2008 |
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Abbreviated title | ICTON |
Country/Territory | Greece |
City | Athens |
Period | 22/06/08 → 26/06/08 |
Keywords
- EWI-13034
- METIS-251061
- IR-64861
- IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY