Silicon oxynitride based photonics

Kerstin Worhoff, E.J. Klein, M.G. Hussein, A. Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    21 Citations (Scopus)
    114 Downloads (Pure)

    Abstract

    Silicon oxynitride is a very attractive material for integrated optics. Besides possessing excellent optical properties it can be deposited with refractive indices varying over a wide range by tuning the material composition. In this contribution we will summarize the key properties of this material class and discuss several application examples. Preliminary results on novel processes, which will lead to largely reduced hydrogen incorporation and enable reflow of SiON material, are being presented.
    Original languageEnglish
    Title of host publicationProceedings 10th Anniversary International Conference on Transparent Optical Networks (ICTON)
    EditorsM. Marciniak, M. Jaworski, M. Zdanowicz
    Place of PublicationPiscataway, NJ
    PublisherIEEE Operations Center
    Pages266-269
    Number of pages4
    ISBN (Print)978-1-4244-2625-6
    DOIs
    Publication statusPublished - 22 Jun 2008
    Event10th Anniversary International Conference on Transparent Optical Networks, ICTON 2008 - Athens, Greece
    Duration: 22 Jun 200826 Jun 2008
    Conference number: 10

    Conference

    Conference10th Anniversary International Conference on Transparent Optical Networks, ICTON 2008
    Abbreviated titleICTON
    CountryGreece
    CityAthens
    Period22/06/0826/06/08

    Keywords

    • EWI-13034
    • METIS-251061
    • IR-64861
    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY

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