Silicon oxynitride in integrated optics

Kerstin Worhoff, A. Driessen, Paul Lambeck, H. Albers, T.J.A. Popma

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationDish Hotel, Enschede
Publication statusPublished - 5 Jun 1996

Keywords

  • METIS-131288

Cite this