Silicon oxynitride in integrated optics

Kerstin Worhoff, R.M. de Ridder, Paul Lambeck, A. Driessen

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Abstract

A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discussed
Original languageUndefined
Title of host publicationProceedings LEOS'98 Conference, vol.2
Place of PublicationOrlando, USA
PublisherIEEE
Pages370-371
ISBN (Print)0-7803-4947-4
DOIs
Publication statusPublished - 4 Dec 1998
Event11th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS) 1998 - Orlando
Duration: 1 Dec 19984 Dec 1998
Conference number: 11

Publication series

Name
PublisherIEEE
Volume2

Conference

Conference11th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS) 1998
CityOrlando
Period1/12/984/12/98

Keywords

  • IR-25885
  • METIS-130688

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