Silicon oxynitride in integrated optics

Kerstin Worhoff; R.M. de Ridder; Paul Lambeck; A. Driessen

doi:10.1109/LEOS.1998.739716

Silicon oxynitride in integrated optics

Kerstin Worhoff, R.M. de Ridder, Paul Lambeck, A. Driessen

Optical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discussed

Original language	Undefined
Title of host publication	Proceedings LEOS'98 Conference, vol.2
Place of Publication	Orlando, USA
Publisher	IEEE
Pages	370-371
ISBN (Print)	0-7803-4947-4
DOIs	https://doi.org/10.1109/LEOS.1998.739716
Publication status	Published - 4 Dec 1998
Event	11th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS) 1998 - Orlando Duration: 1 Dec 1998 → 4 Dec 1998 Conference number: 11

Publication series

Name
Publisher	IEEE
Volume	2

Conference

Conference	11th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS) 1998
City	Orlando
Period	1/12/98 → 4/12/98

Keywords

IR-25885
METIS-130688

Access to Document

10.1109/LEOS.1998.739716

00739716

Cite this

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title = "Silicon oxynitride in integrated optics",

abstract = "A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discussed",

keywords = "IR-25885, METIS-130688",

author = "Kerstin Worhoff and {de Ridder}, R.M. and Paul Lambeck and A. Driessen",

year = "1998",

month = dec,

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doi = "10.1109/LEOS.1998.739716",

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isbn = "0-7803-4947-4",

publisher = "IEEE",

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note = "11th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS) 1998 ; Conference date: 01-12-1998 Through 04-12-1998",

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AU - Worhoff, Kerstin

AU - de Ridder, R.M.

AU - Lambeck, Paul

AU - Driessen, A.

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PY - 1998/12/4

Y1 - 1998/12/4

N2 - A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discussed

AB - A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discussed

KW - IR-25885

KW - METIS-130688

U2 - 10.1109/LEOS.1998.739716

DO - 10.1109/LEOS.1998.739716

M3 - Conference contribution

SN - 0-7803-4947-4

SP - 370

EP - 371

BT - Proceedings LEOS'98 Conference, vol.2

PB - IEEE

CY - Orlando, USA

T2 - 11th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS) 1998

Y2 - 1 December 1998 through 4 December 1998

ER -