Silicon oxynitride planar waveguiding structures for application in optical communication

R.M. de Ridder, Kerstin Worhoff, A. Driessen, Paul Lambeck, H. Albers

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The refractive index of silicon oxynitride (SiON), a widely used material for integrated optics devices, can be chosen in a wide range between 1.45–2.0. We describe how the consequent large design freedom can be exploited on the one hand for a “standard‿ polarization independent optical channel waveguide having a favorable tradeoff between efficient fiberchip coupling and small bend radii (compact devices) and on the other hand for special-purpose and hybrid components where the refractive index should be finely adjusted for obtaining the desired functionality. We illustrate the applicability of SiON by describing a few devices for optical filtering in a new architecture for wavelength multiplexing, modulation, polarization splitting and second-harmonic generation.
Original languageUndefined
Pages (from-to)930-937
Number of pages8
JournalIEEE journal of selected topics in quantum electronics
Issue number6
Publication statusPublished - Nov 1998


  • optical device fabrication
  • Thermo-optic effects
  • Optical polymers
  • EWI-20873
  • tunable filters
  • Birefringence
  • Electro-optic modulation
  • optical communication
  • optical planar waveguides
  • METIS-112073
  • IR-15198
  • CVD
  • Nonlinear optics

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