Silicon oxynitride technology for integrated optical solutions in biomedical applications

Kerstin Worhoff, N. Ismail, B.I. Akça, Markus Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    3 Citations (Scopus)

    Abstract

    Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.
    Original languageUndefined
    Title of host publication13th International Conference on Transparent Optical Networks
    PublisherIEEE
    Pages1-4
    Number of pages4
    ISBN (Print)978-1-4577-0882-4
    DOIs
    Publication statusPublished - 26 Jun 2011
    Event13th International Conference on Transparent Optical Networks, ICTON 2011 - Stockholm, Sweden
    Duration: 26 Jun 201130 Jun 2011
    Conference number: 13

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference13th International Conference on Transparent Optical Networks, ICTON 2011
    Abbreviated titleICTON
    CountrySweden
    CityStockholm
    Period26/06/1130/06/11

    Keywords

    • METIS-281557
    • Integrated Optics
    • Arrayed waveguide grating
    • IR-78638
    • EWI-20786
    • PECVD
    • Raman detection
    • Silicon oxynitride
    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
    • Optical Coherence Tomography

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