Silicon oxynitride technology for integrated optical solutions in biomedical applications

Kerstin Worhoff; N. Ismail; B.I. Akça; Markus Pollnau; R.M. de Ridder

doi:10.1109/ICTON.2011.5970855

Silicon oxynitride technology for integrated optical solutions in biomedical applications

Kerstin Worhoff, N. Ismail, B.I. Akça, Markus Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

3 Citations (Scopus)

11 Downloads (Pure)

Abstract

Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.

Original language	Undefined
Title of host publication	13th International Conference on Transparent Optical Networks
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Print)	978-1-4577-0882-4
DOIs	https://doi.org/10.1109/ICTON.2011.5970855
Publication status	Published - 26 Jun 2011
Event	13th International Conference on Transparent Optical Networks, ICTON 2011 - Stockholm, Sweden Duration: 26 Jun 2011 → 30 Jun 2011 Conference number: 13

Publication series

Name
Publisher	IEEE

Conference

Conference	13th International Conference on Transparent Optical Networks, ICTON 2011
Abbreviated title	ICTON
Country/Territory	Sweden
City	Stockholm
Period	26/06/11 → 30/06/11

Keywords

METIS-281557
Integrated Optics
Arrayed waveguide grating
IR-78638
EWI-20786
PECVD
Raman detection
Silicon oxynitride
IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
Optical Coherence Tomography

Access to Document

10.1109/ICTON.2011.5970855

http://eprints.eemcs.utwente.nl/secure2/20786/01/Th.A4.6.pdf

Cite this

@inproceedings{dd4bbceb2fb44db9a40cc3fba017e11c,

title = "Silicon oxynitride technology for integrated optical solutions in biomedical applications",

abstract = "Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.",

keywords = "METIS-281557, Integrated Optics, Arrayed waveguide grating, IR-78638, EWI-20786, PECVD, Raman detection, Silicon oxynitride, IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY, Optical Coherence Tomography",

author = "Kerstin Worhoff and N. Ismail and B.I. Ak{\c c}a and Markus Pollnau and \{de Ridder\}, R.M.",

year = "2011",

month = jun,

day = "26",

doi = "10.1109/ICTON.2011.5970855",

language = "Undefined",

isbn = "978-1-4577-0882-4",

publisher = "IEEE",

pages = "1--4",

booktitle = "13th International Conference on Transparent Optical Networks",

address = "United States",

note = "13th International Conference on Transparent Optical Networks, ICTON 2011 ; Conference date: 26-06-2011 Through 30-06-2011",

}

Worhoff, K, Ismail, N, Akça, BI, Pollnau, M & de Ridder, RM 2011, Silicon oxynitride technology for integrated optical solutions in biomedical applications. in 13th International Conference on Transparent Optical Networks. IEEE, pp. 1-4, 13th International Conference on Transparent Optical Networks, ICTON 2011, Stockholm, Sweden, 26/06/11. https://doi.org/10.1109/ICTON.2011.5970855

TY - GEN

T1 - Silicon oxynitride technology for integrated optical solutions in biomedical applications

AU - Worhoff, Kerstin

AU - Ismail, N.

AU - Akça, B.I.

AU - Pollnau, Markus

AU - de Ridder, R.M.

N1 - Conference code: 13

PY - 2011/6/26

Y1 - 2011/6/26

N2 - Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.

AB - Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.

KW - METIS-281557

KW - Integrated Optics

KW - Arrayed waveguide grating

KW - IR-78638

KW - EWI-20786

KW - PECVD

KW - Raman detection

KW - Silicon oxynitride

KW - IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY

KW - Optical Coherence Tomography

U2 - 10.1109/ICTON.2011.5970855

DO - 10.1109/ICTON.2011.5970855

M3 - Conference contribution

SN - 978-1-4577-0882-4

SP - 1

EP - 4

BT - 13th International Conference on Transparent Optical Networks

PB - IEEE

T2 - 13th International Conference on Transparent Optical Networks, ICTON 2011

Y2 - 26 June 2011 through 30 June 2011

ER -