Silicon oxynitride waveguides for application in integrated optics

Kerstin Worhoff, A. Driessen, R.M. de Ridder, Paul Lambeck, T.J.A. Popma

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationCMO Conference 1998
Place of PublicationEnschede
Pages-
Number of pages6
Publication statusPublished - 16 Dec 1998

Keywords

  • METIS-130689

Cite this

Worhoff, K., Driessen, A., de Ridder, R. M., Lambeck, P., & Popma, T. J. A. (1998). Silicon oxynitride waveguides for application in integrated optics. In CMO Conference 1998 (pp. -). Enschede.