Silicon oxynitride waveguides for application in integrated optics

Kerstin Worhoff, A. Driessen, R.M. de Ridder, Paul Lambeck, T.J.A. Popma

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationCMO Conference 1998
Place of PublicationEnschede
Number of pages6
Publication statusPublished - 16 Dec 1998


  • METIS-130689

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