Silicon oxynitride waveguides for application in integrated optics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{eecfb65df9a9429bb285dc162ba6098c,

title = "Silicon oxynitride waveguides for application in integrated optics",

keywords = "METIS-130689",

author = "Kerstin Worhoff and A. Driessen and \{de Ridder\}, R.M. and Paul Lambeck and T.J.A. Popma",

year = "1998",

month = dec,

day = "16",

language = "Undefined",

pages = "--",

booktitle = "CMO Conference 1998",

}