Silicon process characterisation by means of X-ray diffraction

J.G.E. Klappe

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Woerlee, P.H., Supervisor
    • Barsony, I., Advisor
    Award date20 May 1994
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9007129-6
    Publication statusPublished - 20 May 1994

    Keywords

    • METIS-111435

    Cite this

    Klappe, J. G. E. (1994). Silicon process characterisation by means of X-ray diffraction. Enschede: Universiteit Twente.