Silicon Resonant Sensors: Operation and Response

A. Prak

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Fluitman, J.H.J., Supervisor
    • Elwenspoek, Michael Curt, Advisor
    Award date8 Oct 1993
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9006407-9
    Publication statusPublished - 8 Oct 1993

    Keywords

    • METIS-111364

    Cite this

    Prak, A. (1993). Silicon Resonant Sensors: Operation and Response. Enschede: Universiteit Twente.