Silicon-rich LPCVD nitride films for micromechanical applications

S. Bouwstra, Th.J.A. Popma, R. Legtenberg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationEurosensors II, Enschede, The Netherlands
    Subtitle of host publicationTechnical Digest
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Publication statusPublished - 1988
    Event4th Symposium on Sensors and Actuators, Eurosensors II 1988 - University of Twente, Enschede, Netherlands
    Duration: 2 Nov 19884 Nov 1988
    Conference number: 4

    Conference

    Conference4th Symposium on Sensors and Actuators, Eurosensors II 1988
    Abbreviated titleEurosensors
    CountryNetherlands
    CityEnschede
    Period2/11/884/11/88

    Cite this