Silicon-rich LPCVD nitride films for micromechanical applications

S. Bouwstra, Th.J.A. Popma, R. Legtenberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Eurosensors II, Enschede, The Netherlands
Subtitle of host publication	Technical Digest
Place of Publication	Enschede
Publisher	University of Twente
Publication status	Published - 1988
Event	4th Symposium on Sensors and Actuators, Eurosensors II 1988 - University of Twente, Enschede, Netherlands Duration: 2 Nov 1988 → 4 Nov 1988 Conference number: 4

Conference	4th Symposium on Sensors and Actuators, Eurosensors II 1988
Abbreviated title	Eurosensors
Country/Territory	Netherlands
City	Enschede
Period	2/11/88 → 4/11/88

Cite this

@inproceedings{19dc47b1e02649d79ade3f7a6f585111,

title = "Silicon-rich LPCVD nitride films for micromechanical applications",

author = "S. Bouwstra and Th.J.A. Popma and R. Legtenberg",

year = "1988",

language = "English",

booktitle = "Eurosensors II, Enschede, The Netherlands",

publisher = "University of Twente",

address = "Netherlands",

note = "4th Symposium on Sensors and Actuators, Eurosensors II 1988, Eurosensors ; Conference date: 02-11-1988 Through 04-11-1988",

}

TY - GEN

T1 - Silicon-rich LPCVD nitride films for micromechanical applications

AU - Bouwstra, S.

AU - Popma, Th.J.A.

AU - Legtenberg, R.

N1 - Conference code: 4

PY - 1988

Y1 - 1988

M3 - Conference contribution

BT - Eurosensors II, Enschede, The Netherlands

PB - University of Twente

CY - Enschede

T2 - 4th Symposium on Sensors and Actuators, Eurosensors II 1988

Y2 - 2 November 1988 through 4 November 1988

ER -