Silicon-rich LPCVD silicon nitride films for micromechanical structures

R. Legtenberg, S. Bouwstra, T.J.A. Popma

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Pages267-268
    Publication statusPublished - 11 Mar 1992
    EventSensortechnologie Conferentie & Workshop 1992: (STW Workshop Sensor Technology) - Koningshof, Veldhoven, Netherlands
    Duration: 11 Mar 199212 Mar 1992

    Conference

    ConferenceSensortechnologie Conferentie & Workshop 1992
    CountryNetherlands
    CityVeldhoven
    Period11/03/9212/03/92

    Keywords

    • METIS-133514

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