Silicon Rich Silicon Nitride Microchannels to Determine Fluid Composition by Near Infrared Absorbance

Anneirudh Sundararajan*, Pep Canyelles Pericàs, Remco J. Wiegerink, Joost C. Lotters

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
57 Downloads (Pure)

Abstract

The aim of multiparameter microfluidic sensors is to determine multiple physical and chemical properties of liquids and gases at a microscale on a same chip platform. Silicon-rich silicon nitride (SiRN) microfluidic channels fabricated with MEMS surface channel technology (SCT) are currently used in multiparameter sensors to detect physical parameters like mass flow rate, density, and pressure with high sensitivity. However, the current platform has limited information on sensing chemical parameters like fluid composition for mixtures of more than two different fluids when using traditional physical methods. The growing interest in integrating optics to microfluidic devices for such measurements has led to an attempt to integrate optics in the current multiparameter sensing platform. Here, we demonstrate absorbance measurements using the Beer-Lambert law for four different methanol in water mixtures in a microfluidic device fabricated with SiRN microchannels using coupled multimode optical fibers. We compare the measured transmission spectral response with the theoretical response of methanol-water mixtures. The absorbance measurements show the feasibility of integrating optical methods at near infrared wavelengths in the state-of-the-art multiparameter flow sensor technology platform.

Original languageEnglish
Title of host publication2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages676-679
Number of pages4
ISBN (Electronic)978-1-6654-0911-7
ISBN (Print)978-1-6654-0912-4
DOIs
Publication statusPublished - 2022
Event35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 9 Jan 202213 Jan 2022
Conference number: 35
https://ieeemems2022.org/

Publication series

NameIEEE Symposium on Mass Storage Systems and Technologies
PublisherIEEE
Volume2022
ISSN (Print)1084-6999
ISSN (Electronic)2160-1968

Conference

Conference35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Abbreviated titleMEMS 2022
Country/TerritoryJapan
CityTokyo
Period9/01/2213/01/22
Internet address

Keywords

  • Absorbance
  • Flow sensors
  • Microfluidic channel
  • Multiparameter sensor
  • Near infrared
  • Optical fibers
  • SiRN
  • Spectral response
  • Surface Channel Technology (SCT)

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