A simple, efficient and reusable fiber-to-chip interconnect is presented. The interconnect is based on a V-groove (wet- chemically etched) in silicon, combined with a loose-mode Si3N4-channel waveguide. The loose-mode waveguide is adiabatically tapered to the integrated optical (sensor) circuitry. This adiabatic taper enables the dimensions of both the integrated optical sensor circuitry and the loose- mode waveguide section to be designed independently. The coupling efficiency of the `plug-it-in' interconnect is tunable between zero and the maximum obtainable value by tightening two adjustment screws. Coupling efficiencies up to 60% using TE-polarized light at wavelength of 632.8 nm have been reproducibly measured.
|Title of host publication||Proceedings Micro-optical Technologies for Measurement, Sensors, and Microsystems II|
|Editors||Olivier M. Parriaux, Ernst-Bernhard Kley|
|Publication status||Published - 1 Mar 1997|
|Name||Proceedings of SPIE|
Heideman, R., & Lambeck, P. (1997). Simple and reusable fibre-to-chip interconnect with adjustable coupling eficiency. In O. M. Parriaux, & E-B. Kley (Eds.), Proceedings Micro-optical Technologies for Measurement, Sensors, and Microsystems II (pp. 238-247). (Proceedings of SPIE; Vol. 3099). SPIE. https://doi.org/10.1117/12.281233