Simulation and development of a 1-bar capacitive differential pressure sensor

M. Pedersen, M.G.H. Meijerink, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings 1996 National Sensor conference
    Place of PublicationDelft
    Pages163-166
    Publication statusPublished - 20 Mar 1996

    Keywords

    • METIS-113753

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