@inproceedings{ffed0aab647f4dc1a2398498ae5b8dcf,
title = "Simulation and development of a 1-bar capacitive differential pressure sensor",
author = "Michael Pedersen and M.G.H. Meijerink and Wouter Olthuis and Piet Bergveld",
year = "1996",
month = mar,
day = "20",
language = "English",
isbn = "90-407-1321-9",
pages = "163--166",
booktitle = "Proceedings 1996 National Sensor Conference",
publisher = "Delft University Press",
note = "1996 National Sensor Conference ; Conference date: 20-03-1996 Through 21-03-1996",
}