Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime

Van Hieu Nguyen, Cora Salm, R. Wenzel, A.J. Mouthaan, F.G. Kuper

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    14 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProceedings ESREF 2002
    Pages1421-1425
    Number of pages5
    Publication statusPublished - 2002

    Keywords

    • METIS-207777

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