Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime

Van Hieu Nguyen, Cora Salm, R. Wenzel, A.J. Mouthaan, F.G. Kuper

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	-
Journal	Microelectronics reliability
Publication status	Published - 2002

Keywords

@article{c458b7488e2d4b7e8982143e9f8cf760,

title = "Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime",

keywords = "METIS-211648",

author = "Nguyen, {Van Hieu} and Cora Salm and R. Wenzel and A.J. Mouthaan and F.G. Kuper",

year = "2002",

language = "Undefined",

pages = "--",

journal = "Microelectronics reliability",

issn = "0026-2714",

publisher = "Elsevier",

}