Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime

Van Hieu Nguyen, Cora Salm, R. Wenzel, A.J. Mouthaan, F.G. Kuper

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)-
    JournalMicroelectronics reliability
    Publication statusPublished - 2002

    Keywords

    • METIS-211648

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