Simulation and fabrication of a mechano-optical sensor for nano-displacements

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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