Simulation of a Nanolink Hot-Plate Device

A.W. Groenland; Alexeij Y. Kovalgin; J. Holleman; Jurriaan Schmitz

Simulation of a Nanolink Hot-Plate Device

A.W. Groenland, Alexeij Y. Kovalgin, J. Holleman, Jurriaan Schmitz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices. Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor

Original language	Undefined
Title of host publication	10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	581-583
Number of pages	3
ISBN (Print)	978-90-73461-49-9
Publication status	Published - 29 Nov 2007
Event	10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 - Veldhoven, Netherlands Duration: 29 Nov 2007 → 30 Nov 2007

Publication series

Name
Publisher	Technology Foundation STW
Number	7

Workshop

Workshop	10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007
Country/Territory	Netherlands
City	Veldhoven
Period	29/11/07 → 30/11/07

Keywords

SC-ICS: Integrated Chemical Sensors
METIS-245951
IR-64585
EWI-11746

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Cite this

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title = "Simulation of a Nanolink Hot-Plate Device",

abstract = "In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link ({\O} 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices. Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor",

keywords = "SC-ICS: Integrated Chemical Sensors, METIS-245951, IR-64585, EWI-11746",

author = "A.W. Groenland and Kovalgin, {Alexeij Y.} and J. Holleman and Jurriaan Schmitz",

year = "2007",

month = nov,

day = "29",

language = "Undefined",

isbn = "978-90-73461-49-9",

publisher = "STW",

number = "7",

pages = "581--583",

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note = "null ; Conference date: 29-11-2007 Through 30-11-2007",

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TY - GEN

T1 - Simulation of a Nanolink Hot-Plate Device

AU - Groenland, A.W.

AU - Kovalgin, Alexeij Y.

AU - Holleman, J.

AU - Schmitz, Jurriaan

PY - 2007/11/29

Y1 - 2007/11/29

N2 - In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices. Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor

AB - In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices. Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor

KW - SC-ICS: Integrated Chemical Sensors

KW - METIS-245951

KW - IR-64585

KW - EWI-11746

M3 - Conference contribution

SN - 978-90-73461-49-9

SP - 581

EP - 583

BT - 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)

PB - STW

CY - Utrecht, The Netherlands

Y2 - 29 November 2007 through 30 November 2007

ER -