TY - GEN
T1 - Simulation of a Nanolink Hot-Plate Device
AU - Groenland, A.W.
AU - Kovalgin, Alexeij Y.
AU - Holleman, J.
AU - Schmitz, Jurriaan
PY - 2007/11/29
Y1 - 2007/11/29
N2 - In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices.
Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor
AB - In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices.
Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor
KW - SC-ICS: Integrated Chemical Sensors
KW - METIS-245951
KW - IR-64585
KW - EWI-11746
M3 - Conference contribution
SN - 978-90-73461-49-9
SP - 581
EP - 583
BT - 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
PB - STW
CY - Utrecht, The Netherlands
Y2 - 29 November 2007 through 30 November 2007
ER -