In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices.
Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor
|Publisher||Technology Foundation STW|
|Workshop||10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007|
|Period||29/11/07 → 30/11/07|
- SC-ICS: Integrated Chemical Sensors