Simulation of anisotropic wet chemical etching using a physical model

E. van Veenendaal, A.J. Nijdam, J. van Suchtelen, K. Sato, Johannes G.E. Gardeniers, W.J.P. van Enckevort, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

18 Citations (Scopus)
36 Downloads (Pure)

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