Simulation of anisotropic wet-chemical etching using a physical model

J. van Suchtelen, K. Sato, E. van Veenendaal, A.J. Nijdam, Johannes G.E. Gardeniers, W.J.P. van Enckevort, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)
336 Downloads (Pure)

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