Simulation Studies of Parametric Amplification in Bio-inspired Flow Sensors

H. Droogendijk, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    20 Downloads (Pure)

    Abstract

    In this paper the effect of parametric amplification in MEMS-based air-flow hairsensors is studied. With an AC-voltage controlled torsional stiffness the rotation of the hair can be influenced. With the appropriate amplitude, phase and frequency, the rotation of the torsional hair system is increased with respect to the case without parametric amplification. Therefore, parametric amplification is identified as a method to improve the performance of MEMS-based hair air flow sensors.
    Original languageUndefined
    Title of host publication21st Micromechanics and Micro systems Europe workshop
    Place of PublicationEnschede, The Netherlands
    PublisherUniversity of Twente - Transducers Science and Technology (TST)
    Pages149-152
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - Sep 2010
    Event21st Micromechanics and Micro systems Europe workshop, Enschede, The Netherlands: 21st Micromechanics and Micro systems Europe workshop - Enschede, The Netherlands
    Duration: 1 Sep 2010 → …

    Publication series

    Name
    PublisherUniversity of Twente, Transducers Science and Technology (TST)

    Conference

    Conference21st Micromechanics and Micro systems Europe workshop, Enschede, The Netherlands
    CityEnschede, The Netherlands
    Period1/09/10 → …

    Keywords

    • METIS-271142
    • EWI-18847
    • TST-Life like
    • IR-74772

    Cite this