Simulation Studies of Parametric Amplification in Bio-inspired Flow Sensors

H. Droogendijk, G.J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    65 Downloads (Pure)

    Abstract

    In this paper the effect of parametric amplification in MEMS-based air-flow hairsensors is studied. With an AC-voltage controlled torsional stiffness the rotation of the hair can be influenced. With the appropriate amplitude, phase and frequency, the rotation of the torsional hair system is increased with respect to the case without parametric amplification. Therefore, parametric amplification is identified as a method to improve the performance of MEMS-based hair air flow sensors.
    Original languageEnglish
    Title of host publication21st Micromechanics and Micro systems Europe Workshop, MME 2010
    Place of PublicationEnschede
    PublisherUniversity of Twente - Transducers Science and Technology (TST)
    Pages149-152
    Number of pages4
    ISBN (Print)978-90-816737-1-6
    Publication statusPublished - Sept 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sept 201029 Sept 2010
    Conference number: 21

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    Country/TerritoryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • TST-Life like

    Fingerprint

    Dive into the research topics of 'Simulation Studies of Parametric Amplification in Bio-inspired Flow Sensors'. Together they form a unique fingerprint.

    Cite this