In this paper the effect of parametric amplification in MEMS-based air-flow hairsensors is studied. With an AC-voltage controlled torsional stiffness the rotation of the hair can be influenced. With the appropriate amplitude, phase and frequency, the rotation of the torsional hair system is increased with respect to the case without parametric amplification. Therefore, parametric amplification is identified as a method to improve the performance of MEMS-based hair air flow sensors.
|Publisher||University of Twente, Transducers Science and Technology (TST)|
|Conference||21st Micromechanics and Micro systems Europe workshop, Enschede, The Netherlands|
|City||Enschede, The Netherlands|
|Period||1/09/10 → …|
- TST-Life like