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Abstract
In this paper the effect of parametric amplification in MEMS-based air-flow hairsensors is studied. With an AC-voltage controlled torsional stiffness the rotation of the hair can be influenced. With the appropriate amplitude, phase and frequency, the rotation of the torsional hair system is increased with respect to the case without parametric amplification. Therefore, parametric amplification is identified as a method to improve the performance of MEMS-based hair air flow sensors.
| Original language | English |
|---|---|
| Title of host publication | 21st Micromechanics and Micro systems Europe Workshop, MME 2010 |
| Place of Publication | Enschede |
| Publisher | University of Twente - Transducers Science and Technology (TST) |
| Pages | 149-152 |
| Number of pages | 4 |
| ISBN (Print) | 978-90-816737-1-6 |
| Publication status | Published - Sept 2010 |
| Event | 21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21 |
Workshop
| Workshop | 21st Micromechanics and Microsystems Europe Workshop, MME 2010 |
|---|---|
| Abbreviated title | MME |
| Country/Territory | Netherlands |
| City | Enschede |
| Period | 26/09/10 → 29/09/10 |
Keywords
- TST-Life like
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Dive into the research topics of 'Simulation Studies of Parametric Amplification in Bio-inspired Flow Sensors'. Together they form a unique fingerprint.Research output
- 1 Book editing
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MME 2010, 21st Micromechanics and Micro systems Europe Workshop: Abstracts
Abelmann, L. (Editor), Groenland, H. (Editor), van Honschoten, J. (Editor) & Verputten, H. (Editor), Sept 2010, Enschede, The Netherlands: University of Twente, Transducers Science and Technology. 326 p.Research output: Book/Report › Book editing › Academic
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