Simulations of Reservoir Effect in Multilevel Al-Based Metallisation

Van Hieu Nguyen, Cora Salm, F.G. Kuper, A.J. Mouthaan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Book of abstracts SAFE conference 2000
Place of Publication	Veldhoven, The Netherlands
Pages	101-105
Publication status	Published - 29 Nov 2000

Keywords

@inproceedings{63435f96389c4896bcc45550b276252d,

title = "Simulations of Reservoir Effect in Multilevel Al-Based Metallisation",

keywords = "METIS-113891",

author = "Nguyen, {Van Hieu} and Cora Salm and F.G. Kuper and A.J. Mouthaan",

year = "2000",

month = nov,

day = "29",

language = "Undefined",

isbn = "90-73461-24-3",

pages = "101--105",

booktitle = "Book of abstracts SAFE conference 2000",

}