Simulations of Reservoir Effect in Multilevel Al-Based Metallisation

Van Hieu Nguyen, Cora Salm, F.G. Kuper, A.J. Mouthaan

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationBook of abstracts SAFE conference 2000
    Place of PublicationVeldhoven, The Netherlands
    Publication statusPublished - 29 Nov 2000


    • METIS-113891

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