Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems

S.N. Yakunin, Igor Alexandrovich Makhotkin, M.A. Chuyev, A.Y. Seregin, E.M. Pashayev, Eric Louis, Robbert Wilhelmus Elisabeth van de Kruijs, Frederik Bijkerk, M.V. Kovalchuk

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Abstract

Structural analysis of periodic multilayers with small period thickness (~4 nm) is a challenging task, especially when thicknesses of intermixed interfaces become comparable to individual layer thicknesses. In general, angular dependent X-ray fluorescence measurements, excited by the X-ray standing wave (XSW) that is formed in the Bragg reflection conditions, can provide information about the in-depth distribution of atoms in a multilayer. The atomic depth profiles in periodic multilayer structures can be obtained with high resolution by simultaneously analyzing the fluorescence data from XSW experiments, together with the analysis of grazing incidence X-ray reflectivity (GI-XRR) experiments. As a first step, the electron density distribution in the multilayer period is obtained by fitting of GI-XRR data. Next, the electromagnetic wave distribution in the multilayer is calculated based on the reconstructed electron density profile which is then used to calculate fluorescence yield from specific materials in x-ray standing wave experiments. The traditional data analysis approach is the simultaneous fit of these two sets of data and it depends on two distributions: the atomic distribution and the electron density distribution. In case of unknown atomic intermixture, there may not be a clear connection between these two distributions leading to fit of non physical parameters.
Original languageEnglish
Pages115-115
Publication statusPublished - 15 Sep 2012

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grazing incidence
standing waves
reflectance
x rays
fluorescence
density distribution
electron density profiles
structural analysis
laminates
electromagnetic radiation
high resolution
profiles
atoms

Keywords

  • IR-103781
  • METIS-304973

Cite this

Yakunin, S. N., Makhotkin, I. A., Chuyev, M. A., Seregin, A. Y., Pashayev, E. M., Louis, E., ... Kovalchuk, M. V. (2012). Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems. 115-115.
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abstract = "Structural analysis of periodic multilayers with small period thickness (~4 nm) is a challenging task, especially when thicknesses of intermixed interfaces become comparable to individual layer thicknesses. In general, angular dependent X-ray fluorescence measurements, excited by the X-ray standing wave (XSW) that is formed in the Bragg reflection conditions, can provide information about the in-depth distribution of atoms in a multilayer. The atomic depth profiles in periodic multilayer structures can be obtained with high resolution by simultaneously analyzing the fluorescence data from XSW experiments, together with the analysis of grazing incidence X-ray reflectivity (GI-XRR) experiments. As a first step, the electron density distribution in the multilayer period is obtained by fitting of GI-XRR data. Next, the electromagnetic wave distribution in the multilayer is calculated based on the reconstructed electron density profile which is then used to calculate fluorescence yield from specific materials in x-ray standing wave experiments. The traditional data analysis approach is the simultaneous fit of these two sets of data and it depends on two distributions: the atomic distribution and the electron density distribution. In case of unknown atomic intermixture, there may not be a clear connection between these two distributions leading to fit of non physical parameters.",
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author = "S.N. Yakunin and Makhotkin, {Igor Alexandrovich} and M.A. Chuyev and A.Y. Seregin and E.M. Pashayev and Eric Louis and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Frederik Bijkerk and M.V. Kovalchuk",
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T1 - Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems

AU - Yakunin, S.N.

AU - Makhotkin, Igor Alexandrovich

AU - Chuyev, M.A.

AU - Seregin, A.Y.

AU - Pashayev, E.M.

AU - Louis, Eric

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Bijkerk, Frederik

AU - Kovalchuk, M.V.

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N2 - Structural analysis of periodic multilayers with small period thickness (~4 nm) is a challenging task, especially when thicknesses of intermixed interfaces become comparable to individual layer thicknesses. In general, angular dependent X-ray fluorescence measurements, excited by the X-ray standing wave (XSW) that is formed in the Bragg reflection conditions, can provide information about the in-depth distribution of atoms in a multilayer. The atomic depth profiles in periodic multilayer structures can be obtained with high resolution by simultaneously analyzing the fluorescence data from XSW experiments, together with the analysis of grazing incidence X-ray reflectivity (GI-XRR) experiments. As a first step, the electron density distribution in the multilayer period is obtained by fitting of GI-XRR data. Next, the electromagnetic wave distribution in the multilayer is calculated based on the reconstructed electron density profile which is then used to calculate fluorescence yield from specific materials in x-ray standing wave experiments. The traditional data analysis approach is the simultaneous fit of these two sets of data and it depends on two distributions: the atomic distribution and the electron density distribution. In case of unknown atomic intermixture, there may not be a clear connection between these two distributions leading to fit of non physical parameters.

AB - Structural analysis of periodic multilayers with small period thickness (~4 nm) is a challenging task, especially when thicknesses of intermixed interfaces become comparable to individual layer thicknesses. In general, angular dependent X-ray fluorescence measurements, excited by the X-ray standing wave (XSW) that is formed in the Bragg reflection conditions, can provide information about the in-depth distribution of atoms in a multilayer. The atomic depth profiles in periodic multilayer structures can be obtained with high resolution by simultaneously analyzing the fluorescence data from XSW experiments, together with the analysis of grazing incidence X-ray reflectivity (GI-XRR) experiments. As a first step, the electron density distribution in the multilayer period is obtained by fitting of GI-XRR data. Next, the electromagnetic wave distribution in the multilayer is calculated based on the reconstructed electron density profile which is then used to calculate fluorescence yield from specific materials in x-ray standing wave experiments. The traditional data analysis approach is the simultaneous fit of these two sets of data and it depends on two distributions: the atomic distribution and the electron density distribution. In case of unknown atomic intermixture, there may not be a clear connection between these two distributions leading to fit of non physical parameters.

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