Single-Chip Computers With Microelectromechanical Systems-Based Magnetic Memory

L. Richard Carley, James A. Bain, Gary K. Fedder, David W. Greve, David F. Guillou, Michael S.C. Lu, Tamal Mukherjee, Suresh Santhanam, Leon Abelmann, Seungook Min

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    This article describes an approach for implementing a complete computer system (CPU, RAM, I/O, and nonvolatile mass memory) on a single integrated-circuit substrate (a chip)—hence, the name "single-chip computer." The approach presented combines advances in the field of microelectromechanical systems (MEMS) and micromagnetics with traditional low-cost very-large-scale integrated circuit style parallel lithographic manufacturing. The primary barrier to the creation of a computer on a chip is the incorporation of a high-capacity [many gigabytes (GB)] re-writable nonvolatile memory (in today's terminology, a disk drive) into an integrated circuit (IC) manufacturing process. This article presents the following design example: a MEMS-based magnetic memory that can store over 2 GB of data in 2 cm2 of die area and whose fabrication is compatible with a standard IC manufacturing process.
    Original languageUndefined
    Pages (from-to)6680-6685
    Number of pages6
    JournalJournal of Applied Physics
    Issue number9
    Publication statusPublished - May 2000


    • IR-55819
    • EWI-972
    • TST-uSPAM: micro Scanning Probe Array Memory
    • SMI-TST: From 2006 in EWI-TST

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