Single chip flow sensing system with a dynamic flow range of more than 4 decades

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    7 Citations (Scopus)

    Abstract

    We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
    Original languageEnglish
    Title of host publicationProceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
    Place of PublicationUSA
    PublisherIEEE
    Pages890-893
    Number of pages4
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - 5 Jun 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://transducers11-beijing.org/

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    CountryChina
    CityBeijing
    Period5/06/119/06/11
    Internet address

    Fingerprint

    Sensors
    Hot Temperature

    Keywords

    • METIS-285094
    • TST-SENSORS
    • EWI-21437
    • IR-79580

    Cite this

    Lammerink, T. S. J., Lötters, J. C., Wiegerink, R. J., Groenesteijn, J., & Haneveld, J. (2011). Single chip flow sensing system with a dynamic flow range of more than 4 decades. In Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 (pp. 890-893). USA: IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969158
    Lammerink, Theodorus S.J. ; Lötters, Joost Conrad ; Wiegerink, Remco J. ; Groenesteijn, Jarno ; Haneveld, J. / Single chip flow sensing system with a dynamic flow range of more than 4 decades. Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA : IEEE, 2011. pp. 890-893
    @inproceedings{f1cb622ed69f48e881e4790e1c582a42,
    title = "Single chip flow sensing system with a dynamic flow range of more than 4 decades",
    abstract = "We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.",
    keywords = "METIS-285094, TST-SENSORS, EWI-21437, IR-79580",
    author = "Lammerink, {Theodorus S.J.} and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.} and Jarno Groenesteijn and J. Haneveld",
    note = "10.1109/TRANSDUCERS.2011.5969158",
    year = "2011",
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    doi = "10.1109/TRANSDUCERS.2011.5969158",
    language = "English",
    isbn = "978-1-4577-0157-3",
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    booktitle = "Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011",
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    }

    Lammerink, TSJ, Lötters, JC, Wiegerink, RJ, Groenesteijn, J & Haneveld, J 2011, Single chip flow sensing system with a dynamic flow range of more than 4 decades. in Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. IEEE, USA, pp. 890-893, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969158

    Single chip flow sensing system with a dynamic flow range of more than 4 decades. / Lammerink, Theodorus S.J.; Lötters, Joost Conrad; Wiegerink, Remco J.; Groenesteijn, Jarno; Haneveld, J.

    Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA : IEEE, 2011. p. 890-893.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    T1 - Single chip flow sensing system with a dynamic flow range of more than 4 decades

    AU - Lammerink, Theodorus S.J.

    AU - Lötters, Joost Conrad

    AU - Wiegerink, Remco J.

    AU - Groenesteijn, Jarno

    AU - Haneveld, J.

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    PY - 2011/6/5

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    N2 - We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

    AB - We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

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    KW - TST-SENSORS

    KW - EWI-21437

    KW - IR-79580

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    PB - IEEE

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    Lammerink TSJ, Lötters JC, Wiegerink RJ, Groenesteijn J, Haneveld J. Single chip flow sensing system with a dynamic flow range of more than 4 decades. In Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE. 2011. p. 890-893 https://doi.org/10.1109/TRANSDUCERS.2011.5969158