Single chip flow sensing system with a dynamic flow range of more than 4 decades

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)

Abstract

We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
Original languageEnglish
Title of host publicationProceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
Place of PublicationUSA
PublisherIEEE
Pages890-893
Number of pages4
ISBN (Print)978-1-4577-0157-3
DOIs
Publication statusPublished - 5 Jun 2011
Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
Duration: 5 Jun 20119 Jun 2011
Conference number: 16
http://transducers11-beijing.org/

Publication series

Name
PublisherIEEE

Conference

Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
Abbreviated titleTRANSDUCERS 2011
CountryChina
CityBeijing
Period5/06/119/06/11
Internet address

Fingerprint

Sensors
Hot Temperature

Keywords

  • METIS-285094
  • TST-SENSORS
  • EWI-21437
  • IR-79580

Cite this

Lammerink, T. S. J., Lötters, J. C., Wiegerink, R. J., Groenesteijn, J., & Haneveld, J. (2011). Single chip flow sensing system with a dynamic flow range of more than 4 decades. In Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 (pp. 890-893). USA: IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969158
Lammerink, Theodorus S.J. ; Lötters, Joost Conrad ; Wiegerink, Remco J. ; Groenesteijn, Jarno ; Haneveld, J. / Single chip flow sensing system with a dynamic flow range of more than 4 decades. Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA : IEEE, 2011. pp. 890-893
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abstract = "We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.",
keywords = "METIS-285094, TST-SENSORS, EWI-21437, IR-79580",
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Lammerink, TSJ, Lötters, JC, Wiegerink, RJ, Groenesteijn, J & Haneveld, J 2011, Single chip flow sensing system with a dynamic flow range of more than 4 decades. in Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. IEEE, USA, pp. 890-893, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969158

Single chip flow sensing system with a dynamic flow range of more than 4 decades. / Lammerink, Theodorus S.J.; Lötters, Joost Conrad; Wiegerink, Remco J.; Groenesteijn, Jarno; Haneveld, J.

Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA : IEEE, 2011. p. 890-893.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Single chip flow sensing system with a dynamic flow range of more than 4 decades

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

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AU - Haneveld, J.

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AB - We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

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KW - TST-SENSORS

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Lammerink TSJ, Lötters JC, Wiegerink RJ, Groenesteijn J, Haneveld J. Single chip flow sensing system with a dynamic flow range of more than 4 decades. In Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE. 2011. p. 890-893 https://doi.org/10.1109/TRANSDUCERS.2011.5969158