Single chip flow sensing system with a dynamic flow range of more than 4 decades

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    Abstract

    We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
    Original languageEnglish
    Title of host publicationProceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
    Place of PublicationUSA
    PublisherIEEE
    Pages890-893
    Number of pages4
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - 5 Jun 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://transducers11-beijing.org/

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    CountryChina
    CityBeijing
    Period5/06/119/06/11
    Internet address

    Keywords

    • METIS-285094
    • TST-SENSORS
    • EWI-21437
    • IR-79580

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  • Cite this

    Lammerink, T. S. J., Lötters, J. C., Wiegerink, R. J., Groenesteijn, J., & Haneveld, J. (2011). Single chip flow sensing system with a dynamic flow range of more than 4 decades. In Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 (pp. 890-893). USA: IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969158