Single chip flow sensing system with a dynamic flow range of more than 4 decades

Theodorus S.J. Lammerink; Joost Conrad Lötters; Remco J. Wiegerink; Jarno Groenesteijn; J. Haneveld

doi:10.1109/TRANSDUCERS.2011.5969158

Single chip flow sensing system with a dynamic flow range of more than 4 decades

Theodorus S.J. Lammerink, Joost Conrad Lötters, Remco J. Wiegerink, Jarno Groenesteijn, J. Haneveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

9 Citations (Scopus)

5 Downloads (Pure)

Abstract

We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

Original language	English
Title of host publication	Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
Place of Publication	USA
Publisher	IEEE
Pages	890-893
Number of pages	4
ISBN (Print)	978-1-4577-0157-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969158
Publication status	Published - 5 Jun 2011
Event	16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/

Publication series

Name
Publisher	IEEE

Conference

Conference	16th International Solid-State Sensors, Actuators and Microsystems Conference
Abbreviated title	TRANSDUCERS 2011
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11
Internet address	http://transducers11-beijing.org/

Keywords

METIS-285094
TST-SENSORS
EWI-21437
IR-79580

Access to Document

10.1109/TRANSDUCERS.2011.5969158

Cite this

@inproceedings{f1cb622ed69f48e881e4790e1c582a42,

title = "Single chip flow sensing system with a dynamic flow range of more than 4 decades",

abstract = "We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.",

keywords = "METIS-285094, TST-SENSORS, EWI-21437, IR-79580",

author = "Lammerink, \{Theodorus S.J.\} and L{\"o}tters, \{Joost Conrad\} and Wiegerink, \{Remco J.\} and Jarno Groenesteijn and J. Haneveld",

note = "10.1109/TRANSDUCERS.2011.5969158 ; 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 ; Conference date: 05-06-2011 Through 09-06-2011",

year = "2011",

month = jun,

day = "5",

doi = "10.1109/TRANSDUCERS.2011.5969158",

language = "English",

isbn = "978-1-4577-0157-3",

publisher = "IEEE",

pages = "890--893",

booktitle = "Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011",

address = "United States",

url = "http://transducers11-beijing.org/",

}

Lammerink, TSJ, Lötters, JC , Wiegerink, RJ , Groenesteijn, J & Haneveld, J 2011, Single chip flow sensing system with a dynamic flow range of more than 4 decades. in Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. IEEE, USA, pp. 890-893, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969158

Single chip flow sensing system with a dynamic flow range of more than 4 decades. / Lammerink, Theodorus S.J.; Lötters, Joost Conrad ; Wiegerink, Remco J. et al.
Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE, 2011. p. 890-893.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Single chip flow sensing system with a dynamic flow range of more than 4 decades

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

AU - Groenesteijn, Jarno

AU - Haneveld, J.

N1 - Conference code: 16

PY - 2011/6/5

Y1 - 2011/6/5

N2 - We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

AB - We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

KW - METIS-285094

KW - TST-SENSORS

KW - EWI-21437

KW - IR-79580

U2 - 10.1109/TRANSDUCERS.2011.5969158

DO - 10.1109/TRANSDUCERS.2011.5969158

M3 - Conference contribution

SN - 978-1-4577-0157-3

SP - 890

EP - 893

BT - Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011

PB - IEEE

CY - USA

T2 - 16th International Solid-State Sensors, Actuators and Microsystems Conference

Y2 - 5 June 2011 through 9 June 2011

ER -

Single chip flow sensing system with a dynamic flow range of more than 4 decades

Abstract

Publication series

Conference

Keywords

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