Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Jarno Groenesteijn; Dennis Alveringh; Maarten Groen; Remco J. Wiegerink; Joost C. Lötters

doi:10.1109/MEMSYS.2016.7421747

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Jarno Groenesteijn, Dennis Alveringh, Maarten Groen, Remco J. Wiegerink, Joost C. Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)

87 Downloads (Pure)

Abstract

We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.

Original language	English
Title of host publication	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	788-791
Number of pages	4
ISBN (Electronic)	978-1-5090-1973-1
ISBN (Print)	978-1-5090-1972-4 (USB)
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421747
Publication status	Published - 24 Jan 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016 Conference number: 29

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Abbreviated title	MEMS
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

Keywords

22/3 OA procedure

Access to Document

10.1109/MEMSYS.2016.7421747

ArticleFinal published version, 1.48 MBLicence: Taverne

Cite this

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title = "Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve",

abstract = "We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.",

keywords = "22/3 OA procedure",

author = "Jarno Groenesteijn and Dennis Alveringh and Maarten Groen and Wiegerink, {Remco J.} and L{\"o}tters, {Joost C.}",

year = "2016",

month = jan,

day = "24",

doi = "10.1109/MEMSYS.2016.7421747",

language = "English",

isbn = "978-1-5090-1972-4 (USB)",

pages = "788--791",

booktitle = "29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016",

publisher = "IEEE",

address = "United States",

note = "29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, MEMS ; Conference date: 24-01-2016 Through 28-01-2016",

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Groenesteijn, J , Alveringh, D, Groen, M, Wiegerink, RJ & Lötters, JC 2016, Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. in 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. IEEE, Piscataway, NJ, pp. 788-791, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421747

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. / Groenesteijn, Jarno ; Alveringh, Dennis; Groen, Maarten et al.
29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ: IEEE, 2016. p. 788-791.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

AU - Groen, Maarten

AU - Wiegerink, Remco J.

AU - Lötters, Joost C.

N1 - Conference code: 29

PY - 2016/1/24

Y1 - 2016/1/24

N2 - We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.

AB - We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.

KW - 22/3 OA procedure

U2 - 10.1109/MEMSYS.2016.7421747

DO - 10.1109/MEMSYS.2016.7421747

M3 - Conference contribution

SN - 978-1-5090-1972-4 (USB)

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EP - 791

BT - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

PB - IEEE

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Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

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Keywords

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