Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Jarno Groenesteijn, Dennis Alveringh, Maarten Groen, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Abstract

We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.
Original languageUndefined
Title of host publication29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Place of PublicationUSA
PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
Pages788-791
Number of pages4
ISBN (Print)978-1-5090-1972-4
DOIs
Publication statusPublished - 24 Jan 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 24 Jan 201628 Jan 2016
Conference number: 29

Publication series

Name
PublisherIEEE

Conference

Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Abbreviated titleMEMS
CountryChina
CityShanghai
Period24/01/1628/01/16

Keywords

  • EWI-26809
  • IR-100170
  • METIS-316835

Cite this

Groenesteijn, J., Alveringh, D., Groen, M., Wiegerink, R. J., & Lötters, J. C. (2016). Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. In 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 (pp. 788-791). USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. https://doi.org/10.1109/MEMSYS.2016.7421747
Groenesteijn, Jarno ; Alveringh, Dennis ; Groen, Maarten ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2016. pp. 788-791
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abstract = "We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.",
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author = "Jarno Groenesteijn and Dennis Alveringh and Maarten Groen and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",
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Groenesteijn, J, Alveringh, D, Groen, M, Wiegerink, RJ & Lötters, JC 2016, Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. in 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. IEEE ROBOTICS AND AUTOMATION SOCIETY, USA, pp. 788-791, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421747

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. / Groenesteijn, Jarno; Alveringh, Dennis; Groen, Maarten; Wiegerink, Remco J.; Lötters, Joost Conrad.

29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2016. p. 788-791.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

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N2 - We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.

AB - We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.

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Groenesteijn J, Alveringh D, Groen M, Wiegerink RJ, Lötters JC. Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve. In 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. 2016. p. 788-791 https://doi.org/10.1109/MEMSYS.2016.7421747