Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Jarno Groenesteijn, Dennis Alveringh, Maarten Groen, Remco J. Wiegerink, Joost Conrad Lötters

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    Abstract

    We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70mg/h nitrogen gas at an applied pressure of 500mbar.
    Original languageUndefined
    Title of host publication29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
    Place of PublicationUSA
    PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
    Pages788-791
    Number of pages4
    ISBN (Print)978-1-5090-1972-4
    DOIs
    Publication statusPublished - 24 Jan 2016
    Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
    Duration: 24 Jan 201628 Jan 2016
    Conference number: 29

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
    Abbreviated titleMEMS
    CountryChina
    CityShanghai
    Period24/01/1628/01/16

    Keywords

    • EWI-26809
    • IR-100170
    • METIS-316835

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