Single element excitation and detection of (micro-)mechanical resonators

Harrie A.C. Tilmans, Dominicus J. IJntema, Jan H.J. Fluitman

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    23 Citations (Scopus)
    69 Downloads (Pure)

    Abstract

    The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90° in the transfer characteristic around resonance is required.
    Original languageEnglish
    Title of host publicationTransducers '91
    Subtitle of host publication1991 International Conference on Solid-State Sensors and Actuators
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages533-537
    Number of pages5
    ISBN (Print)0-87942-585-7
    DOIs
    Publication statusPublished - 24 Jun 1991
    Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
    Duration: 24 Jun 199127 Jun 1991

    Conference

    Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
    Abbreviated titleTRANSDUCERS '91
    CountryUnited States
    CitySan Francisco
    Period24/06/9127/06/91

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