Abstract
The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90° in the transfer characteristic around resonance is required.
Original language | English |
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Title of host publication | Transducers '91 |
Subtitle of host publication | 1991 International Conference on Solid-State Sensors and Actuators |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 533-537 |
Number of pages | 5 |
ISBN (Print) | 0-87942-585-7 |
DOIs | |
Publication status | Published - 24 Jun 1991 |
Event | 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States Duration: 24 Jun 1991 → 27 Jun 1991 |
Conference
Conference | 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 |
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Abbreviated title | TRANSDUCERS '91 |
Country/Territory | United States |
City | San Francisco |
Period | 24/06/91 → 27/06/91 |