Single element excitation and detection of (micro-)mechanical resonators

Harrie A.C. Tilmans; Dominicus J. IJntema; Jan H.J. Fluitman

doi:10.1109/SENSOR.1991.148931

Single element excitation and detection of (micro-)mechanical resonators

Harrie A.C. Tilmans
, Dominicus J. IJntema
, Jan H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

26 Citations (Scopus)

228 Downloads (Pure)

Abstract

The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90° in the transfer characteristic around resonance is required.

Original language	English
Title of host publication	Transducers '91
Subtitle of host publication	1991 International Conference on Solid-State Sensors and Actuators
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	533-537
Number of pages	5
ISBN (Print)	0-87942-585-7
DOIs	https://doi.org/10.1109/SENSOR.1991.148931
Publication status	Published - 24 Jun 1991
Event	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States Duration: 24 Jun 1991 → 27 Jun 1991

Conference

Conference	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
Abbreviated title	TRANSDUCERS '91
Country/Territory	United States
City	San Francisco
Period	24/06/91 → 27/06/91

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10.1109/SENSOR.1991.148931

Hilmans1991singleFinal published version, 435 KB

Cite this

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title = "Single element excitation and detection of (micro-)mechanical resonators",

abstract = "The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90° in the transfer characteristic around resonance is required.",

author = "Tilmans, \{Harrie A.C.\} and IJntema, \{Dominicus J.\} and Fluitman, \{Jan H.J.\}",

year = "1991",

month = jun,

day = "24",

doi = "10.1109/SENSOR.1991.148931",

language = "English",

isbn = "0-87942-585-7",

pages = "533--537",

booktitle = "Transducers '91",

publisher = "IEEE",

address = "United States",

note = "1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, TRANSDUCERS '91 ; Conference date: 24-06-1991 Through 27-06-1991",

}

Tilmans, HAC, IJntema, DJ & Fluitman, JHJ 1991, Single element excitation and detection of (micro-)mechanical resonators. in Transducers '91: 1991 International Conference on Solid-State Sensors and Actuators. IEEE, Piscataway, NJ, pp. 533-537, 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, San Francisco, California, United States, 24/06/91. https://doi.org/10.1109/SENSOR.1991.148931

Single element excitation and detection of (micro-)mechanical resonators. / Tilmans, Harrie A.C.; IJntema, Dominicus J.; Fluitman, Jan H.J.
Transducers '91: 1991 International Conference on Solid-State Sensors and Actuators. Piscataway, NJ: IEEE, 1991. p. 533-537.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Single element excitation and detection of (micro-)mechanical resonators

AU - Tilmans, Harrie A.C.

AU - IJntema, Dominicus J.

AU - Fluitman, Jan H.J.

PY - 1991/6/24

Y1 - 1991/6/24

N2 - The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90° in the transfer characteristic around resonance is required.

AB - The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90° in the transfer characteristic around resonance is required.

U2 - 10.1109/SENSOR.1991.148931

DO - 10.1109/SENSOR.1991.148931

M3 - Conference contribution

SN - 0-87942-585-7

SP - 533

EP - 537

BT - Transducers '91

PB - IEEE

CY - Piscataway, NJ

T2 - 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991

Y2 - 24 June 1991 through 27 June 1991

ER -

Single element excitation and detection of (micro-)mechanical resonators

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