Single-layer active-passive Al2O3 at the wafer level: optimization study

C.I. van Emmerik, M. Dijkstra, Lantian Chang, M. de Goede, Jinfeng Mu, S.M. García Blanco

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 15 Nov 2018
Event23rd Annual Symposium of the IEEE Photonics Benelux Chapter 2018 - Paleis der Academiën, Brussels, Belgium
Duration: 15 Nov 201816 Nov 2018
Conference number: 23
https://www.aanmelder.nl/ipb2018symposium

Conference

Conference23rd Annual Symposium of the IEEE Photonics Benelux Chapter 2018
CountryBelgium
CityBrussels
Period15/11/1816/11/18
Internet address

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