Single-layer active-passive Al2O3 at the wafer level: optimization study

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 15 Nov 2018
Event	23rd Annual Symposium of the IEEE Photonics Benelux Chapter 2018 - Paleis der Academiën, Brussels, Belgium Duration: 15 Nov 2018 → 16 Nov 2018 Conference number: 23 https://www.aanmelder.nl/ipb2018symposium

Conference	23rd Annual Symposium of the IEEE Photonics Benelux Chapter 2018
Country/Territory	Belgium
City	Brussels
Period	15/11/18 → 16/11/18
Internet address	https://www.aanmelder.nl/ipb2018symposium

Cite this

@conference{9775a1e767ff4fa3a1cd4f505a4f9e6b,

title = "Single-layer active-passive Al2O3 at the wafer level: optimization study",

author = "\{van Emmerik\}, C.I. and M. Dijkstra and Lantian Chang and \{de Goede\}, M. and Jinfeng Mu and \{Garc{\'i}a Blanco\}, S.M.",

year = "2018",

month = nov,

day = "15",

language = "English",

note = "23rd Annual Symposium of the IEEE Photonics Benelux Chapter 2018 ; Conference date: 15-11-2018 Through 16-11-2018",

url = "https://www.aanmelder.nl/ipb2018symposium",

}

TY - CONF

T1 - Single-layer active-passive Al2O3 at the wafer level: optimization study

AU - van Emmerik, C.I.

AU - Dijkstra, M.

AU - Chang, Lantian

AU - de Goede, M.

AU - Mu, Jinfeng

AU - García Blanco, S.M.

N1 - Conference code: 23

PY - 2018/11/15

Y1 - 2018/11/15

M3 - Poster

T2 - 23rd Annual Symposium of the IEEE Photonics Benelux Chapter 2018

Y2 - 15 November 2018 through 16 November 2018

ER -