TY - JOUR
T1 - Single-layer active-passive Al2O3 photonic integration platform
AU - Van Emmerik, Carlijn I.
AU - Dijkstra, Meindert
AU - De Goede, Michiel
AU - Chang, Lantian
AU - Mu, Jinfeng
AU - Garcia-blanco, Sonia M.
PY - 2018/9/10
Y1 - 2018/9/10
N2 - Amorphous Al2O3 is an attractive platform for integrated photonics, providing active and passive functionalities. We have developed an integration procedure to create active and passive regions at the same level on one wafer. This fabrication process reduces the number of fabrication steps compared to vertical integration of two materials. The main advantage is that all structures are defined within a single photolithography and etching step and are therefore automatically aligned. As a proof of principle, we demonstrated the luminescence of an active ring resonator with passive bus waveguide.
AB - Amorphous Al2O3 is an attractive platform for integrated photonics, providing active and passive functionalities. We have developed an integration procedure to create active and passive regions at the same level on one wafer. This fabrication process reduces the number of fabrication steps compared to vertical integration of two materials. The main advantage is that all structures are defined within a single photolithography and etching step and are therefore automatically aligned. As a proof of principle, we demonstrated the luminescence of an active ring resonator with passive bus waveguide.
UR - http://www.scopus.com/inward/record.url?scp=85053908126&partnerID=8YFLogxK
U2 - 10.1364/OME.8.003049
DO - 10.1364/OME.8.003049
M3 - Article
SN - 2159-3930
VL - 8
SP - 3049
EP - 3054
JO - Optical materials express
JF - Optical materials express
IS - 10
ER -