Single-layer active-passive Al2O3 photonic integration platform

Carlijn I. Van Emmerik* (Corresponding Author), Meindert Dijkstra, Michiel De Goede, Lantian Chang, Jinfeng Mu, Sonia M. Garcia-blanco

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
73 Downloads (Pure)

Abstract

Amorphous Al2O3 is an attractive platform for integrated photonics, providing active and passive functionalities. We have developed an integration procedure to create active and passive regions at the same level on one wafer. This fabrication process reduces the number of fabrication steps compared to vertical integration of two materials. The main advantage is that all structures are defined within a single photolithography and etching step and are therefore automatically aligned. As a proof of principle, we demonstrated the luminescence of an active ring resonator with passive bus waveguide.
Original languageEnglish
Pages (from-to)3049-3054
Number of pages6
JournalOptical materials express
Volume8
Issue number10
DOIs
Publication statusPublished - 10 Sep 2018

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