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Single-order lamellar multilayer gratings
R. van der Meer
Laser Physics & Nonlinear Optics
Faculty of Science and Technology
XUV Optics
Research output
:
Thesis
›
PhD Thesis - Research UT, graduation UT
139
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Physics & Astronomy
gratings
100%
optics
59%
reflectance
58%
spectral resolution
56%
mirrors
39%
x ray fluorescence
37%
performance
36%
incident radiation
32%
diffraction
29%
x rays
24%
tungsten
23%
lithography
23%
absorbers
22%
etching
20%
degradation
20%
oxidation
20%
bandwidth
19%
life (durability)
18%
optical properties
17%
fabrication
16%
air
16%
characterization
15%
silicon
14%
approximation
14%
excitation
13%
ions
12%