Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Robert van der Meer; Igor Kozhevnikov; Balachander Krishnan; Jurriaan Huskens; Petra Hegeman; Christian Brons; Boris Vratzov; Bert Bastiaens; Klaus Boller; Fred Bijkerk

doi:10.1063/1.4774297

Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Robert van der Meer, Igor Kozhevnikov, Balachander Krishnan, Jurriaan Huskens, Petra Hegeman, Christian Brons, Boris Vratzov, Bert Bastiaens, Klaus Boller, Fred Bijkerk

Research output: Contribution to journal › Article › Academic › peer-review

18 Citations (Scopus)

108 Downloads (Pure)

Abstract

We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations

Original language	English
Article number	012103
Number of pages	7
Journal	AIP advances
Volume	3
Issue number	1
DOIs	https://doi.org/10.1063/1.4774297
Publication status	Published - 2 Jan 2013

Access to Document

10.1063/1.4774297

Meer2013single-orderFinal published version, 466 KB

Cite this

@article{3b4de33662bf4cc88a97075ce4e1c3fa,

title = "Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range",

abstract = "We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations",

author = "{van der Meer}, Robert and Igor Kozhevnikov and Balachander Krishnan and Jurriaan Huskens and Petra Hegeman and Christian Brons and Boris Vratzov and Bert Bastiaens and Klaus Boller and Fred Bijkerk",

year = "2013",

month = jan,

day = "2",

doi = "10.1063/1.4774297",

language = "English",

volume = "3",

journal = "AIP advances",

issn = "2158-3226",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

AU - van der Meer, Robert

AU - Kozhevnikov, Igor

AU - Krishnan, Balachander

AU - Huskens, Jurriaan

AU - Hegeman, Petra

AU - Brons, Christian

AU - Vratzov, Boris

AU - Bastiaens, Bert

AU - Boller, Klaus

AU - Bijkerk, Fred

PY - 2013/1/2

Y1 - 2013/1/2

N2 - We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations

AB - We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations

U2 - 10.1063/1.4774297

DO - 10.1063/1.4774297

M3 - Article

VL - 3

JO - AIP advances

JF - AIP advances

SN - 2158-3226

IS - 1

M1 - 012103

ER -

Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Abstract

Access to Document

Fingerprint

Cite this