Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Robert van der Meer, Igor Kozhevnikov, Balachander Krishnan, Jurriaan Huskens, Petra Hegeman, Christian Brons, Boris Vratzov, Bert Bastiaens, Klaus Boller, Fred Bijkerk

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Abstract

We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations
Original languageEnglish
Article number012103
Number of pages7
JournalAIP advances
Volume3
Issue number1
DOIs
Publication statusPublished - 2 Jan 2013

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